10/21/2010	3:32:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2010	3:32:24 PM	Recipe started at 3:32 PM
10/21/2010	3:32:24 PM	H2 valve closed
10/21/2010	3:32:24 PM	BCl3 valve closed
10/21/2010	3:32:24 PM	PH3 valve closed
10/21/2010	3:32:24 PM	SiCl4 pre valve closed
10/21/2010	3:32:24 PM	SiCl4 post valve closed
10/21/2010	3:32:24 PM	Main Vac valve closed
10/21/2010	3:32:24 PM	Bypass valve closed
10/21/2010	3:32:24 PM	Bubbler valve closed
10/21/2010	3:32:24 PM	Helium valve opened
10/21/2010	3:32:24 PM	Helium MFC set to  500.000000
10/21/2010	3:32:24 PM	H2 MFC set to  0.000000
10/21/2010	3:32:24 PM	BCl3 MFC set to  0.000000
10/21/2010	3:32:24 PM	PHl3 MFC set to  0.000000
10/21/2010	3:32:24 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:32:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:32:24 PM	Tube furnace set to 0
10/21/2010	3:33:44 PM	Helium valve closed
10/21/2010	3:33:44 PM	H2 valve closed
10/21/2010	3:33:44 PM	BCl3 valve closed
10/21/2010	3:33:44 PM	PH3 valve closed
10/21/2010	3:33:44 PM	SiCl4 pre valve closed
10/21/2010	3:33:44 PM	SiCl4 post valve closed
10/21/2010	3:33:44 PM	Main Vac valve closed
10/21/2010	3:33:44 PM	Bypass valve closed
10/21/2010	3:33:44 PM	Bubbler valve closed
10/21/2010	3:33:44 PM	Helium MFC set to  0.000000
10/21/2010	3:33:44 PM	H2 MFC set to  0.000000
10/21/2010	3:33:44 PM	BCl3 MFC set to  0.000000
10/21/2010	3:33:44 PM	PHl3 MFC set to  0.000000
10/21/2010	3:33:44 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:33:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:33:44 PM	Tube furnace set to 0
10/21/2010	3:33:44 PM	Run finished at 3:33 PM
10/21/2010	3:33:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2010	3:57:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2010	3:57:34 PM	Recipe started at 3:57 PM
10/21/2010	3:57:34 PM	Helium valve closed
10/21/2010	3:57:34 PM	H2 valve closed
10/21/2010	3:57:34 PM	BCl3 valve closed
10/21/2010	3:57:34 PM	PH3 valve closed
10/21/2010	3:57:34 PM	SiCl4 pre valve closed
10/21/2010	3:57:34 PM	SiCl4 post valve closed
10/21/2010	3:57:34 PM	Main Vac valve closed
10/21/2010	3:57:34 PM	Bubbler valve closed
10/21/2010	3:57:34 PM	Bypass valve opened
10/21/2010	3:57:34 PM	Helium MFC set to  0.000000
10/21/2010	3:57:34 PM	H2 MFC set to  0.000000
10/21/2010	3:57:34 PM	BCl3 MFC set to  0.000000
10/21/2010	3:57:34 PM	PHl3 MFC set to  0.000000
10/21/2010	3:57:34 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:57:34 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:57:34 PM	Tube furnace set to 0
10/21/2010	3:58:23 PM	Helium valve closed
10/21/2010	3:58:23 PM	H2 valve closed
10/21/2010	3:58:23 PM	BCl3 valve closed
10/21/2010	3:58:23 PM	PH3 valve closed
10/21/2010	3:58:23 PM	SiCl4 pre valve closed
10/21/2010	3:58:23 PM	SiCl4 post valve closed
10/21/2010	3:58:23 PM	Bubbler valve closed
10/21/2010	3:58:23 PM	Main Vac valve opened
10/21/2010	3:58:23 PM	Bypass valve opened
10/21/2010	3:58:23 PM	Helium MFC set to  0.000000
10/21/2010	3:58:23 PM	H2 MFC set to  0.000000
10/21/2010	3:58:23 PM	BCl3 MFC set to  0.000000
10/21/2010	3:58:23 PM	PHl3 MFC set to  0.000000
10/21/2010	3:58:23 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:58:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:58:24 PM	Tube furnace set to 0
10/21/2010	3:58:24 PM	Run finished at 3:58 PM
10/21/2010	3:58:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2010	3:59:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	3:59:57 PM	Recipe started at 3:59 PM
10/21/2010	3:59:57 PM	Helium valve closed
10/21/2010	3:59:57 PM	H2 valve closed
10/21/2010	3:59:57 PM	BCl3 valve closed
10/21/2010	3:59:57 PM	PH3 valve closed
10/21/2010	3:59:57 PM	SiCl4 pre valve closed
10/21/2010	3:59:57 PM	SiCl4 post valve closed
10/21/2010	3:59:57 PM	Main Vac valve closed
10/21/2010	3:59:57 PM	Bubbler valve closed
10/21/2010	3:59:57 PM	Bypass valve opened
10/21/2010	3:59:57 PM	Helium MFC set to  0.000000
10/21/2010	3:59:57 PM	H2 MFC set to  0.000000
10/21/2010	3:59:57 PM	BCl3 MFC set to  0.000000
10/21/2010	3:59:57 PM	PHl3 MFC set to  0.000000
10/21/2010	3:59:57 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:59:57 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:59:57 PM	Tube furnace set to 0
10/21/2010	3:59:58 PM	Helium valve closed
10/21/2010	3:59:58 PM	H2 valve closed
10/21/2010	3:59:58 PM	BCl3 valve closed
10/21/2010	3:59:58 PM	PH3 valve closed
10/21/2010	3:59:58 PM	SiCl4 pre valve closed
10/21/2010	3:59:58 PM	SiCl4 post valve closed
10/21/2010	3:59:58 PM	Bubbler valve closed
10/21/2010	3:59:58 PM	Main Vac valve opened
10/21/2010	3:59:58 PM	Bypass valve opened
10/21/2010	3:59:58 PM	Helium MFC set to  0.000000
10/21/2010	3:59:58 PM	H2 MFC set to  0.000000
10/21/2010	3:59:58 PM	BCl3 MFC set to  0.000000
10/21/2010	3:59:58 PM	PHl3 MFC set to  0.000000
10/21/2010	3:59:58 PM	SiCl4 MFC set to  0.000000
10/21/2010	3:59:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	3:59:58 PM	Tube furnace set to 0
10/21/2010	4:00:58 PM	H2 valve closed
10/21/2010	4:00:58 PM	BCl3 valve closed
10/21/2010	4:00:58 PM	PH3 valve closed
10/21/2010	4:00:58 PM	SiCl4 pre valve closed
10/21/2010	4:00:58 PM	SiCl4 post valve closed
10/21/2010	4:00:58 PM	Bubbler valve closed
10/21/2010	4:00:58 PM	Helium valve opened
10/21/2010	4:00:58 PM	Main Vac valve opened
10/21/2010	4:00:58 PM	Bypass valve opened
10/21/2010	4:00:58 PM	Helium MFC set to  100.000000
10/21/2010	4:00:58 PM	H2 MFC set to  0.000000
10/21/2010	4:00:58 PM	BCl3 MFC set to  0.000000
10/21/2010	4:00:58 PM	PHl3 MFC set to  0.000000
10/21/2010	4:00:58 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:00:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:00:58 PM	Tube furnace set to 0
10/21/2010	4:01:58 PM	Helium valve closed
10/21/2010	4:01:58 PM	H2 valve closed
10/21/2010	4:01:58 PM	BCl3 valve closed
10/21/2010	4:01:58 PM	PH3 valve closed
10/21/2010	4:01:58 PM	SiCl4 pre valve closed
10/21/2010	4:01:58 PM	SiCl4 post valve closed
10/21/2010	4:01:58 PM	Bubbler valve closed
10/21/2010	4:01:58 PM	Main Vac valve opened
10/21/2010	4:01:58 PM	Bypass valve opened
10/21/2010	4:01:58 PM	Helium MFC set to  0.000000
10/21/2010	4:01:58 PM	H2 MFC set to  0.000000
10/21/2010	4:01:58 PM	BCl3 MFC set to  0.000000
10/21/2010	4:01:58 PM	PHl3 MFC set to  0.000000
10/21/2010	4:01:58 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:01:58 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:01:58 PM	Tube furnace set to 0
10/21/2010	4:02:11 PM	H2 valve closed
10/21/2010	4:02:11 PM	BCl3 valve closed
10/21/2010	4:02:11 PM	PH3 valve closed
10/21/2010	4:02:11 PM	SiCl4 pre valve closed
10/21/2010	4:02:11 PM	SiCl4 post valve closed
10/21/2010	4:02:11 PM	Bubbler valve closed
10/21/2010	4:02:11 PM	Helium valve opened
10/21/2010	4:02:11 PM	Main Vac valve opened
10/21/2010	4:02:11 PM	Bypass valve opened
10/21/2010	4:02:11 PM	Helium MFC set to  100.000000
10/21/2010	4:02:11 PM	H2 MFC set to  0.000000
10/21/2010	4:02:11 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:11 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:11 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:11 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:11 PM	Tube furnace set to 0
10/21/2010	4:02:12 PM	Helium valve closed
10/21/2010	4:02:12 PM	H2 valve closed
10/21/2010	4:02:12 PM	BCl3 valve closed
10/21/2010	4:02:12 PM	PH3 valve closed
10/21/2010	4:02:12 PM	SiCl4 pre valve closed
10/21/2010	4:02:12 PM	SiCl4 post valve closed
10/21/2010	4:02:12 PM	Bubbler valve closed
10/21/2010	4:02:12 PM	Main Vac valve opened
10/21/2010	4:02:12 PM	Bypass valve opened
10/21/2010	4:02:12 PM	Helium MFC set to  0.000000
10/21/2010	4:02:12 PM	H2 MFC set to  0.000000
10/21/2010	4:02:12 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:12 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:12 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:12 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:12 PM	Tube furnace set to 0
10/21/2010	4:02:13 PM	H2 valve closed
10/21/2010	4:02:13 PM	BCl3 valve closed
10/21/2010	4:02:13 PM	PH3 valve closed
10/21/2010	4:02:13 PM	SiCl4 pre valve closed
10/21/2010	4:02:13 PM	SiCl4 post valve closed
10/21/2010	4:02:13 PM	Bubbler valve closed
10/21/2010	4:02:13 PM	Helium valve opened
10/21/2010	4:02:13 PM	Main Vac valve opened
10/21/2010	4:02:13 PM	Bypass valve opened
10/21/2010	4:02:13 PM	Helium MFC set to  100.000000
10/21/2010	4:02:13 PM	H2 MFC set to  0.000000
10/21/2010	4:02:13 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:13 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:13 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:13 PM	Tube furnace set to 0
10/21/2010	4:02:14 PM	Helium valve closed
10/21/2010	4:02:14 PM	H2 valve closed
10/21/2010	4:02:14 PM	BCl3 valve closed
10/21/2010	4:02:14 PM	PH3 valve closed
10/21/2010	4:02:14 PM	SiCl4 pre valve closed
10/21/2010	4:02:14 PM	SiCl4 post valve closed
10/21/2010	4:02:14 PM	Bubbler valve closed
10/21/2010	4:02:14 PM	Main Vac valve opened
10/21/2010	4:02:14 PM	Bypass valve opened
10/21/2010	4:02:14 PM	Helium MFC set to  0.000000
10/21/2010	4:02:14 PM	H2 MFC set to  0.000000
10/21/2010	4:02:14 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:14 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:14 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:14 PM	Tube furnace set to 0
10/21/2010	4:02:16 PM	H2 valve closed
10/21/2010	4:02:16 PM	BCl3 valve closed
10/21/2010	4:02:16 PM	PH3 valve closed
10/21/2010	4:02:16 PM	SiCl4 pre valve closed
10/21/2010	4:02:16 PM	SiCl4 post valve closed
10/21/2010	4:02:16 PM	Bubbler valve closed
10/21/2010	4:02:16 PM	Helium valve opened
10/21/2010	4:02:16 PM	Main Vac valve opened
10/21/2010	4:02:16 PM	Bypass valve opened
10/21/2010	4:02:16 PM	Helium MFC set to  100.000000
10/21/2010	4:02:16 PM	H2 MFC set to  0.000000
10/21/2010	4:02:16 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:16 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:16 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:16 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:17 PM	Tube furnace set to 0
10/21/2010	4:02:17 PM	Helium valve closed
10/21/2010	4:02:17 PM	H2 valve closed
10/21/2010	4:02:17 PM	BCl3 valve closed
10/21/2010	4:02:17 PM	PH3 valve closed
10/21/2010	4:02:17 PM	SiCl4 pre valve closed
10/21/2010	4:02:17 PM	SiCl4 post valve closed
10/21/2010	4:02:17 PM	Bubbler valve closed
10/21/2010	4:02:17 PM	Main Vac valve opened
10/21/2010	4:02:17 PM	Bypass valve opened
10/21/2010	4:02:17 PM	Helium MFC set to  0.000000
10/21/2010	4:02:17 PM	H2 MFC set to  0.000000
10/21/2010	4:02:17 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:17 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:17 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:17 PM	Tube furnace set to 0
10/21/2010	4:02:19 PM	H2 valve closed
10/21/2010	4:02:19 PM	BCl3 valve closed
10/21/2010	4:02:19 PM	PH3 valve closed
10/21/2010	4:02:19 PM	SiCl4 pre valve closed
10/21/2010	4:02:19 PM	SiCl4 post valve closed
10/21/2010	4:02:19 PM	Bubbler valve closed
10/21/2010	4:02:19 PM	Helium valve opened
10/21/2010	4:02:19 PM	Main Vac valve opened
10/21/2010	4:02:19 PM	Bypass valve opened
10/21/2010	4:02:19 PM	Helium MFC set to  100.000000
10/21/2010	4:02:19 PM	H2 MFC set to  0.000000
10/21/2010	4:02:19 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:19 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:19 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:19 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:19 PM	Tube furnace set to 0
10/21/2010	4:02:20 PM	Helium valve closed
10/21/2010	4:02:20 PM	H2 valve closed
10/21/2010	4:02:20 PM	BCl3 valve closed
10/21/2010	4:02:20 PM	PH3 valve closed
10/21/2010	4:02:20 PM	SiCl4 pre valve closed
10/21/2010	4:02:20 PM	SiCl4 post valve closed
10/21/2010	4:02:20 PM	Bubbler valve closed
10/21/2010	4:02:20 PM	Main Vac valve opened
10/21/2010	4:02:20 PM	Bypass valve opened
10/21/2010	4:02:20 PM	Helium MFC set to  0.000000
10/21/2010	4:02:20 PM	H2 MFC set to  0.000000
10/21/2010	4:02:20 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:20 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:20 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:20 PM	Tube furnace set to 0
10/21/2010	4:02:21 PM	H2 valve closed
10/21/2010	4:02:21 PM	BCl3 valve closed
10/21/2010	4:02:21 PM	PH3 valve closed
10/21/2010	4:02:21 PM	SiCl4 pre valve closed
10/21/2010	4:02:21 PM	SiCl4 post valve closed
10/21/2010	4:02:21 PM	Bubbler valve closed
10/21/2010	4:02:22 PM	Helium valve opened
10/21/2010	4:02:22 PM	Main Vac valve opened
10/21/2010	4:02:22 PM	Bypass valve opened
10/21/2010	4:02:22 PM	Helium MFC set to  100.000000
10/21/2010	4:02:22 PM	H2 MFC set to  0.000000
10/21/2010	4:02:22 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:22 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:22 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:22 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:22 PM	Tube furnace set to 0
10/21/2010	4:02:23 PM	Helium valve closed
10/21/2010	4:02:23 PM	H2 valve closed
10/21/2010	4:02:23 PM	BCl3 valve closed
10/21/2010	4:02:23 PM	PH3 valve closed
10/21/2010	4:02:23 PM	SiCl4 pre valve closed
10/21/2010	4:02:23 PM	SiCl4 post valve closed
10/21/2010	4:02:23 PM	Bubbler valve closed
10/21/2010	4:02:23 PM	Main Vac valve opened
10/21/2010	4:02:23 PM	Bypass valve opened
10/21/2010	4:02:23 PM	Helium MFC set to  0.000000
10/21/2010	4:02:23 PM	H2 MFC set to  0.000000
10/21/2010	4:02:23 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:23 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:23 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:23 PM	Tube furnace set to 0
10/21/2010	4:02:25 PM	H2 valve closed
10/21/2010	4:02:25 PM	BCl3 valve closed
10/21/2010	4:02:25 PM	PH3 valve closed
10/21/2010	4:02:25 PM	SiCl4 pre valve closed
10/21/2010	4:02:25 PM	SiCl4 post valve closed
10/21/2010	4:02:25 PM	Bubbler valve closed
10/21/2010	4:02:25 PM	Helium valve opened
10/21/2010	4:02:25 PM	Main Vac valve opened
10/21/2010	4:02:25 PM	Bypass valve opened
10/21/2010	4:02:25 PM	Helium MFC set to  100.000000
10/21/2010	4:02:25 PM	H2 MFC set to  0.000000
10/21/2010	4:02:25 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:25 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:25 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:25 PM	Tube furnace set to 0
10/21/2010	4:02:26 PM	Helium valve closed
10/21/2010	4:02:26 PM	H2 valve closed
10/21/2010	4:02:26 PM	BCl3 valve closed
10/21/2010	4:02:26 PM	PH3 valve closed
10/21/2010	4:02:26 PM	SiCl4 pre valve closed
10/21/2010	4:02:26 PM	SiCl4 post valve closed
10/21/2010	4:02:26 PM	Bubbler valve closed
10/21/2010	4:02:26 PM	Main Vac valve opened
10/21/2010	4:02:26 PM	Bypass valve opened
10/21/2010	4:02:26 PM	Helium MFC set to  0.000000
10/21/2010	4:02:26 PM	H2 MFC set to  0.000000
10/21/2010	4:02:26 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:26 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:26 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:26 PM	Tube furnace set to 0
10/21/2010	4:02:31 PM	H2 valve closed
10/21/2010	4:02:31 PM	BCl3 valve closed
10/21/2010	4:02:31 PM	PH3 valve closed
10/21/2010	4:02:31 PM	SiCl4 pre valve closed
10/21/2010	4:02:31 PM	SiCl4 post valve closed
10/21/2010	4:02:31 PM	Bubbler valve closed
10/21/2010	4:02:31 PM	Helium valve opened
10/21/2010	4:02:31 PM	Main Vac valve opened
10/21/2010	4:02:31 PM	Bypass valve opened
10/21/2010	4:02:31 PM	Helium MFC set to  100.000000
10/21/2010	4:02:31 PM	H2 MFC set to  0.000000
10/21/2010	4:02:31 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:31 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:31 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:31 PM	Tube furnace set to 0
10/21/2010	4:02:32 PM	Helium valve closed
10/21/2010	4:02:32 PM	H2 valve closed
10/21/2010	4:02:32 PM	BCl3 valve closed
10/21/2010	4:02:32 PM	PH3 valve closed
10/21/2010	4:02:32 PM	SiCl4 pre valve closed
10/21/2010	4:02:32 PM	SiCl4 post valve closed
10/21/2010	4:02:32 PM	Bubbler valve closed
10/21/2010	4:02:32 PM	Main Vac valve opened
10/21/2010	4:02:32 PM	Bypass valve opened
10/21/2010	4:02:32 PM	Helium MFC set to  0.000000
10/21/2010	4:02:32 PM	H2 MFC set to  0.000000
10/21/2010	4:02:32 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:32 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:32 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:32 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:32 PM	Tube furnace set to 0
10/21/2010	4:02:36 PM	H2 valve closed
10/21/2010	4:02:36 PM	BCl3 valve closed
10/21/2010	4:02:36 PM	PH3 valve closed
10/21/2010	4:02:36 PM	SiCl4 pre valve closed
10/21/2010	4:02:36 PM	SiCl4 post valve closed
10/21/2010	4:02:36 PM	Bubbler valve closed
10/21/2010	4:02:36 PM	Helium valve opened
10/21/2010	4:02:36 PM	Main Vac valve opened
10/21/2010	4:02:36 PM	Bypass valve opened
10/21/2010	4:02:36 PM	Helium MFC set to  100.000000
10/21/2010	4:02:36 PM	H2 MFC set to  0.000000
10/21/2010	4:02:36 PM	BCl3 MFC set to  0.000000
10/21/2010	4:02:36 PM	PHl3 MFC set to  0.000000
10/21/2010	4:02:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:02:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:02:37 PM	Tube furnace set to 0
10/21/2010	4:03:37 PM	Helium valve closed
10/21/2010	4:03:37 PM	H2 valve closed
10/21/2010	4:03:37 PM	BCl3 valve closed
10/21/2010	4:03:37 PM	PH3 valve closed
10/21/2010	4:03:37 PM	SiCl4 pre valve closed
10/21/2010	4:03:37 PM	SiCl4 post valve closed
10/21/2010	4:03:37 PM	Bubbler valve closed
10/21/2010	4:03:37 PM	Main Vac valve opened
10/21/2010	4:03:37 PM	Bypass valve opened
10/21/2010	4:03:37 PM	Helium MFC set to  0.000000
10/21/2010	4:03:37 PM	H2 MFC set to  0.000000
10/21/2010	4:03:37 PM	BCl3 MFC set to  0.000000
10/21/2010	4:03:37 PM	PHl3 MFC set to  0.000000
10/21/2010	4:03:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:03:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:03:37 PM	Tube furnace set to 0
10/21/2010	4:04:37 PM	H2 valve closed
10/21/2010	4:04:37 PM	BCl3 valve closed
10/21/2010	4:04:37 PM	PH3 valve closed
10/21/2010	4:04:37 PM	SiCl4 pre valve closed
10/21/2010	4:04:37 PM	SiCl4 post valve closed
10/21/2010	4:04:37 PM	Bubbler valve closed
10/21/2010	4:04:37 PM	Helium valve opened
10/21/2010	4:04:37 PM	Main Vac valve opened
10/21/2010	4:04:37 PM	Bypass valve opened
10/21/2010	4:04:37 PM	Helium MFC set to  100.000000
10/21/2010	4:04:37 PM	H2 MFC set to  0.000000
10/21/2010	4:04:37 PM	BCl3 MFC set to  0.000000
10/21/2010	4:04:37 PM	PHl3 MFC set to  0.000000
10/21/2010	4:04:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:04:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:04:37 PM	Tube furnace set to 0
10/21/2010	4:05:37 PM	Helium valve closed
10/21/2010	4:05:37 PM	H2 valve closed
10/21/2010	4:05:37 PM	BCl3 valve closed
10/21/2010	4:05:37 PM	PH3 valve closed
10/21/2010	4:05:37 PM	SiCl4 pre valve closed
10/21/2010	4:05:37 PM	SiCl4 post valve closed
10/21/2010	4:05:37 PM	Bubbler valve closed
10/21/2010	4:05:37 PM	Main Vac valve opened
10/21/2010	4:05:37 PM	Bypass valve opened
10/21/2010	4:05:37 PM	Helium MFC set to  0.000000
10/21/2010	4:05:37 PM	H2 MFC set to  0.000000
10/21/2010	4:05:37 PM	BCl3 MFC set to  0.000000
10/21/2010	4:05:37 PM	PHl3 MFC set to  0.000000
10/21/2010	4:05:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	4:05:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	4:05:37 PM	Tube furnace set to 0
10/21/2010	4:05:38 PM	Run finished at 4:05 PM
10/21/2010	4:05:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	5:49:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	5:49:23 PM	Recipe started at 5:49 PM
10/21/2010	5:49:23 PM	Helium valve closed
10/21/2010	5:49:23 PM	H2 valve closed
10/21/2010	5:49:23 PM	BCl3 valve closed
10/21/2010	5:49:23 PM	PH3 valve closed
10/21/2010	5:49:23 PM	SiCl4 pre valve closed
10/21/2010	5:49:23 PM	SiCl4 post valve closed
10/21/2010	5:49:23 PM	Main Vac valve closed
10/21/2010	5:49:23 PM	Bubbler valve closed
10/21/2010	5:49:23 PM	Bypass valve opened
10/21/2010	5:49:23 PM	Helium MFC set to  0.000000
10/21/2010	5:49:23 PM	H2 MFC set to  0.000000
10/21/2010	5:49:23 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:23 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:23 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:23 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:23 PM	Tube furnace set to 0
10/21/2010	5:49:24 PM	Helium valve closed
10/21/2010	5:49:24 PM	H2 valve closed
10/21/2010	5:49:24 PM	BCl3 valve closed
10/21/2010	5:49:24 PM	PH3 valve closed
10/21/2010	5:49:24 PM	SiCl4 pre valve closed
10/21/2010	5:49:24 PM	SiCl4 post valve closed
10/21/2010	5:49:24 PM	Bubbler valve closed
10/21/2010	5:49:24 PM	Main Vac valve opened
10/21/2010	5:49:24 PM	Bypass valve opened
10/21/2010	5:49:24 PM	Helium MFC set to  0.000000
10/21/2010	5:49:24 PM	H2 MFC set to  0.000000
10/21/2010	5:49:24 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:24 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:24 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:24 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:24 PM	Tube furnace set to 0
10/21/2010	5:49:26 PM	H2 valve closed
10/21/2010	5:49:26 PM	BCl3 valve closed
10/21/2010	5:49:26 PM	PH3 valve closed
10/21/2010	5:49:26 PM	SiCl4 pre valve closed
10/21/2010	5:49:26 PM	SiCl4 post valve closed
10/21/2010	5:49:26 PM	Bubbler valve closed
10/21/2010	5:49:26 PM	Helium valve opened
10/21/2010	5:49:26 PM	Main Vac valve opened
10/21/2010	5:49:26 PM	Bypass valve opened
10/21/2010	5:49:26 PM	Helium MFC set to  100.000000
10/21/2010	5:49:26 PM	H2 MFC set to  0.000000
10/21/2010	5:49:26 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:26 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:26 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:26 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:26 PM	Tube furnace set to 0
10/21/2010	5:49:27 PM	Helium valve closed
10/21/2010	5:49:27 PM	H2 valve closed
10/21/2010	5:49:27 PM	BCl3 valve closed
10/21/2010	5:49:27 PM	PH3 valve closed
10/21/2010	5:49:27 PM	SiCl4 pre valve closed
10/21/2010	5:49:27 PM	SiCl4 post valve closed
10/21/2010	5:49:27 PM	Bubbler valve closed
10/21/2010	5:49:27 PM	Main Vac valve opened
10/21/2010	5:49:27 PM	Bypass valve opened
10/21/2010	5:49:27 PM	Helium MFC set to  0.000000
10/21/2010	5:49:27 PM	H2 MFC set to  0.000000
10/21/2010	5:49:27 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:27 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:27 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:27 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:27 PM	Tube furnace set to 0
10/21/2010	5:49:28 PM	H2 valve closed
10/21/2010	5:49:28 PM	BCl3 valve closed
10/21/2010	5:49:28 PM	PH3 valve closed
10/21/2010	5:49:28 PM	SiCl4 pre valve closed
10/21/2010	5:49:28 PM	SiCl4 post valve closed
10/21/2010	5:49:28 PM	Bubbler valve closed
10/21/2010	5:49:28 PM	Helium valve opened
10/21/2010	5:49:28 PM	Main Vac valve opened
10/21/2010	5:49:28 PM	Bypass valve opened
10/21/2010	5:49:28 PM	Helium MFC set to  100.000000
10/21/2010	5:49:28 PM	H2 MFC set to  0.000000
10/21/2010	5:49:28 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:28 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:28 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:28 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:28 PM	Tube furnace set to 0
10/21/2010	5:49:28 PM	Helium valve closed
10/21/2010	5:49:28 PM	H2 valve closed
10/21/2010	5:49:28 PM	BCl3 valve closed
10/21/2010	5:49:28 PM	PH3 valve closed
10/21/2010	5:49:28 PM	SiCl4 pre valve closed
10/21/2010	5:49:28 PM	SiCl4 post valve closed
10/21/2010	5:49:28 PM	Bubbler valve closed
10/21/2010	5:49:28 PM	Main Vac valve opened
10/21/2010	5:49:28 PM	Bypass valve opened
10/21/2010	5:49:28 PM	Helium MFC set to  0.000000
10/21/2010	5:49:28 PM	H2 MFC set to  0.000000
10/21/2010	5:49:28 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:28 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:28 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:28 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:28 PM	Tube furnace set to 0
10/21/2010	5:49:29 PM	H2 valve closed
10/21/2010	5:49:29 PM	BCl3 valve closed
10/21/2010	5:49:29 PM	PH3 valve closed
10/21/2010	5:49:29 PM	SiCl4 pre valve closed
10/21/2010	5:49:29 PM	SiCl4 post valve closed
10/21/2010	5:49:29 PM	Bubbler valve closed
10/21/2010	5:49:29 PM	Helium valve opened
10/21/2010	5:49:29 PM	Main Vac valve opened
10/21/2010	5:49:29 PM	Bypass valve opened
10/21/2010	5:49:29 PM	Helium MFC set to  100.000000
10/21/2010	5:49:29 PM	H2 MFC set to  0.000000
10/21/2010	5:49:29 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:29 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:29 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:29 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:29 PM	Tube furnace set to 0
10/21/2010	5:49:30 PM	Helium valve closed
10/21/2010	5:49:30 PM	H2 valve closed
10/21/2010	5:49:30 PM	BCl3 valve closed
10/21/2010	5:49:30 PM	PH3 valve closed
10/21/2010	5:49:30 PM	SiCl4 pre valve closed
10/21/2010	5:49:30 PM	SiCl4 post valve closed
10/21/2010	5:49:30 PM	Bubbler valve closed
10/21/2010	5:49:30 PM	Main Vac valve opened
10/21/2010	5:49:30 PM	Bypass valve opened
10/21/2010	5:49:30 PM	Helium MFC set to  0.000000
10/21/2010	5:49:30 PM	H2 MFC set to  0.000000
10/21/2010	5:49:30 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:30 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:30 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:30 PM	Tube furnace set to 0
10/21/2010	5:49:30 PM	H2 valve closed
10/21/2010	5:49:30 PM	BCl3 valve closed
10/21/2010	5:49:30 PM	PH3 valve closed
10/21/2010	5:49:30 PM	SiCl4 pre valve closed
10/21/2010	5:49:30 PM	SiCl4 post valve closed
10/21/2010	5:49:30 PM	Bubbler valve closed
10/21/2010	5:49:30 PM	Helium valve opened
10/21/2010	5:49:30 PM	Main Vac valve opened
10/21/2010	5:49:30 PM	Bypass valve opened
10/21/2010	5:49:30 PM	Helium MFC set to  100.000000
10/21/2010	5:49:30 PM	H2 MFC set to  0.000000
10/21/2010	5:49:30 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:30 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:30 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:30 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:30 PM	Tube furnace set to 0
10/21/2010	5:49:31 PM	Helium valve closed
10/21/2010	5:49:31 PM	H2 valve closed
10/21/2010	5:49:31 PM	BCl3 valve closed
10/21/2010	5:49:31 PM	PH3 valve closed
10/21/2010	5:49:31 PM	SiCl4 pre valve closed
10/21/2010	5:49:31 PM	SiCl4 post valve closed
10/21/2010	5:49:31 PM	Bubbler valve closed
10/21/2010	5:49:31 PM	Main Vac valve opened
10/21/2010	5:49:31 PM	Bypass valve opened
10/21/2010	5:49:31 PM	Helium MFC set to  0.000000
10/21/2010	5:49:31 PM	H2 MFC set to  0.000000
10/21/2010	5:49:31 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:31 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:31 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:31 PM	Tube furnace set to 0
10/21/2010	5:49:35 PM	H2 valve closed
10/21/2010	5:49:35 PM	BCl3 valve closed
10/21/2010	5:49:35 PM	PH3 valve closed
10/21/2010	5:49:35 PM	SiCl4 pre valve closed
10/21/2010	5:49:35 PM	SiCl4 post valve closed
10/21/2010	5:49:35 PM	Bubbler valve closed
10/21/2010	5:49:35 PM	Helium valve opened
10/21/2010	5:49:35 PM	Main Vac valve opened
10/21/2010	5:49:35 PM	Bypass valve opened
10/21/2010	5:49:35 PM	Helium MFC set to  100.000000
10/21/2010	5:49:35 PM	H2 MFC set to  0.000000
10/21/2010	5:49:35 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:35 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:35 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:35 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:35 PM	Tube furnace set to 0
10/21/2010	5:49:35 PM	Helium valve closed
10/21/2010	5:49:35 PM	H2 valve closed
10/21/2010	5:49:35 PM	BCl3 valve closed
10/21/2010	5:49:35 PM	PH3 valve closed
10/21/2010	5:49:35 PM	SiCl4 pre valve closed
10/21/2010	5:49:35 PM	SiCl4 post valve closed
10/21/2010	5:49:35 PM	Bubbler valve closed
10/21/2010	5:49:35 PM	Main Vac valve opened
10/21/2010	5:49:35 PM	Bypass valve opened
10/21/2010	5:49:35 PM	Helium MFC set to  0.000000
10/21/2010	5:49:35 PM	H2 MFC set to  0.000000
10/21/2010	5:49:35 PM	BCl3 MFC set to  0.000000
10/21/2010	5:49:35 PM	PHl3 MFC set to  0.000000
10/21/2010	5:49:35 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:49:35 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:49:36 PM	Tube furnace set to 0
10/21/2010	5:50:36 PM	H2 valve closed
10/21/2010	5:50:36 PM	BCl3 valve closed
10/21/2010	5:50:36 PM	PH3 valve closed
10/21/2010	5:50:36 PM	SiCl4 pre valve closed
10/21/2010	5:50:36 PM	SiCl4 post valve closed
10/21/2010	5:50:36 PM	Bubbler valve closed
10/21/2010	5:50:36 PM	Helium valve opened
10/21/2010	5:50:36 PM	Main Vac valve opened
10/21/2010	5:50:36 PM	Bypass valve opened
10/21/2010	5:50:36 PM	Helium MFC set to  100.000000
10/21/2010	5:50:36 PM	H2 MFC set to  0.000000
10/21/2010	5:50:36 PM	BCl3 MFC set to  0.000000
10/21/2010	5:50:36 PM	PHl3 MFC set to  0.000000
10/21/2010	5:50:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:50:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:50:36 PM	Tube furnace set to 0
10/21/2010	5:51:36 PM	Helium valve closed
10/21/2010	5:51:36 PM	H2 valve closed
10/21/2010	5:51:36 PM	BCl3 valve closed
10/21/2010	5:51:36 PM	PH3 valve closed
10/21/2010	5:51:36 PM	SiCl4 pre valve closed
10/21/2010	5:51:36 PM	SiCl4 post valve closed
10/21/2010	5:51:36 PM	Bubbler valve closed
10/21/2010	5:51:36 PM	Main Vac valve opened
10/21/2010	5:51:36 PM	Bypass valve opened
10/21/2010	5:51:36 PM	Helium MFC set to  0.000000
10/21/2010	5:51:36 PM	H2 MFC set to  0.000000
10/21/2010	5:51:36 PM	BCl3 MFC set to  0.000000
10/21/2010	5:51:36 PM	PHl3 MFC set to  0.000000
10/21/2010	5:51:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:51:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:51:36 PM	Tube furnace set to 0
10/21/2010	5:52:36 PM	H2 valve closed
10/21/2010	5:52:36 PM	BCl3 valve closed
10/21/2010	5:52:36 PM	PH3 valve closed
10/21/2010	5:52:36 PM	SiCl4 pre valve closed
10/21/2010	5:52:36 PM	SiCl4 post valve closed
10/21/2010	5:52:36 PM	Bubbler valve closed
10/21/2010	5:52:36 PM	Helium valve opened
10/21/2010	5:52:36 PM	Main Vac valve opened
10/21/2010	5:52:36 PM	Bypass valve opened
10/21/2010	5:52:36 PM	Helium MFC set to  100.000000
10/21/2010	5:52:36 PM	H2 MFC set to  0.000000
10/21/2010	5:52:36 PM	BCl3 MFC set to  0.000000
10/21/2010	5:52:36 PM	PHl3 MFC set to  0.000000
10/21/2010	5:52:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:52:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:52:36 PM	Tube furnace set to 0
10/21/2010	5:53:36 PM	Helium valve closed
10/21/2010	5:53:36 PM	H2 valve closed
10/21/2010	5:53:36 PM	BCl3 valve closed
10/21/2010	5:53:36 PM	PH3 valve closed
10/21/2010	5:53:36 PM	SiCl4 pre valve closed
10/21/2010	5:53:36 PM	SiCl4 post valve closed
10/21/2010	5:53:36 PM	Bubbler valve closed
10/21/2010	5:53:36 PM	Main Vac valve opened
10/21/2010	5:53:36 PM	Bypass valve opened
10/21/2010	5:53:36 PM	Helium MFC set to  0.000000
10/21/2010	5:53:36 PM	H2 MFC set to  0.000000
10/21/2010	5:53:36 PM	BCl3 MFC set to  0.000000
10/21/2010	5:53:36 PM	PHl3 MFC set to  0.000000
10/21/2010	5:53:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:53:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:53:36 PM	Tube furnace set to 0
10/21/2010	5:54:36 PM	H2 valve closed
10/21/2010	5:54:36 PM	BCl3 valve closed
10/21/2010	5:54:36 PM	PH3 valve closed
10/21/2010	5:54:36 PM	SiCl4 pre valve closed
10/21/2010	5:54:36 PM	SiCl4 post valve closed
10/21/2010	5:54:36 PM	Bubbler valve closed
10/21/2010	5:54:36 PM	Helium valve opened
10/21/2010	5:54:36 PM	Main Vac valve opened
10/21/2010	5:54:36 PM	Bypass valve opened
10/21/2010	5:54:36 PM	Helium MFC set to  100.000000
10/21/2010	5:54:36 PM	H2 MFC set to  0.000000
10/21/2010	5:54:36 PM	BCl3 MFC set to  0.000000
10/21/2010	5:54:36 PM	PHl3 MFC set to  0.000000
10/21/2010	5:54:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:54:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:54:37 PM	Tube furnace set to 0
10/21/2010	5:55:37 PM	Helium valve closed
10/21/2010	5:55:37 PM	H2 valve closed
10/21/2010	5:55:37 PM	BCl3 valve closed
10/21/2010	5:55:37 PM	PH3 valve closed
10/21/2010	5:55:37 PM	SiCl4 pre valve closed
10/21/2010	5:55:37 PM	SiCl4 post valve closed
10/21/2010	5:55:37 PM	Bubbler valve closed
10/21/2010	5:55:37 PM	Main Vac valve opened
10/21/2010	5:55:37 PM	Bypass valve opened
10/21/2010	5:55:37 PM	Helium MFC set to  0.000000
10/21/2010	5:55:37 PM	H2 MFC set to  0.000000
10/21/2010	5:55:37 PM	BCl3 MFC set to  0.000000
10/21/2010	5:55:37 PM	PHl3 MFC set to  0.000000
10/21/2010	5:55:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:55:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:55:37 PM	Tube furnace set to 0
10/21/2010	5:56:37 PM	H2 valve closed
10/21/2010	5:56:37 PM	BCl3 valve closed
10/21/2010	5:56:37 PM	PH3 valve closed
10/21/2010	5:56:37 PM	SiCl4 pre valve closed
10/21/2010	5:56:37 PM	SiCl4 post valve closed
10/21/2010	5:56:37 PM	Bubbler valve closed
10/21/2010	5:56:37 PM	Helium valve opened
10/21/2010	5:56:37 PM	Main Vac valve opened
10/21/2010	5:56:37 PM	Bypass valve opened
10/21/2010	5:56:37 PM	Helium MFC set to  100.000000
10/21/2010	5:56:37 PM	H2 MFC set to  0.000000
10/21/2010	5:56:37 PM	BCl3 MFC set to  0.000000
10/21/2010	5:56:37 PM	PHl3 MFC set to  0.000000
10/21/2010	5:56:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:56:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:56:37 PM	Tube furnace set to 0
10/21/2010	5:57:37 PM	Helium valve closed
10/21/2010	5:57:37 PM	H2 valve closed
10/21/2010	5:57:37 PM	BCl3 valve closed
10/21/2010	5:57:37 PM	PH3 valve closed
10/21/2010	5:57:37 PM	SiCl4 pre valve closed
10/21/2010	5:57:37 PM	SiCl4 post valve closed
10/21/2010	5:57:37 PM	Bubbler valve closed
10/21/2010	5:57:37 PM	Main Vac valve opened
10/21/2010	5:57:37 PM	Bypass valve opened
10/21/2010	5:57:37 PM	Helium MFC set to  0.000000
10/21/2010	5:57:37 PM	H2 MFC set to  0.000000
10/21/2010	5:57:37 PM	BCl3 MFC set to  0.000000
10/21/2010	5:57:37 PM	PHl3 MFC set to  0.000000
10/21/2010	5:57:37 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:57:37 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:57:37 PM	Tube furnace set to 0
10/21/2010	5:57:39 PM	H2 valve closed
10/21/2010	5:57:39 PM	BCl3 valve closed
10/21/2010	5:57:39 PM	PH3 valve closed
10/21/2010	5:57:39 PM	SiCl4 pre valve closed
10/21/2010	5:57:39 PM	SiCl4 post valve closed
10/21/2010	5:57:39 PM	Bubbler valve closed
10/21/2010	5:57:39 PM	Helium valve opened
10/21/2010	5:57:39 PM	Main Vac valve opened
10/21/2010	5:57:39 PM	Bypass valve opened
10/21/2010	5:57:39 PM	Helium MFC set to  100.000000
10/21/2010	5:57:39 PM	H2 MFC set to  0.000000
10/21/2010	5:57:39 PM	BCl3 MFC set to  0.000000
10/21/2010	5:57:39 PM	PHl3 MFC set to  0.000000
10/21/2010	5:57:39 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:57:39 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:57:40 PM	Tube furnace set to 0
10/21/2010	5:57:40 PM	Helium valve closed
10/21/2010	5:57:40 PM	H2 valve closed
10/21/2010	5:57:40 PM	BCl3 valve closed
10/21/2010	5:57:40 PM	PH3 valve closed
10/21/2010	5:57:40 PM	SiCl4 pre valve closed
10/21/2010	5:57:40 PM	SiCl4 post valve closed
10/21/2010	5:57:40 PM	Bubbler valve closed
10/21/2010	5:57:40 PM	Main Vac valve opened
10/21/2010	5:57:40 PM	Bypass valve opened
10/21/2010	5:57:40 PM	Helium MFC set to  0.000000
10/21/2010	5:57:40 PM	H2 MFC set to  0.000000
10/21/2010	5:57:40 PM	BCl3 MFC set to  0.000000
10/21/2010	5:57:40 PM	PHl3 MFC set to  0.000000
10/21/2010	5:57:40 PM	SiCl4 MFC set to  0.000000
10/21/2010	5:57:40 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	5:57:40 PM	Tube furnace set to 0
10/21/2010	5:57:41 PM	Run finished at 5:57 PM
10/21/2010	5:57:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	6:02:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/21/2010	6:02:02 PM	Recipe started at 6:02 PM
10/21/2010	6:02:02 PM	Helium valve closed
10/21/2010	6:02:02 PM	H2 valve closed
10/21/2010	6:02:02 PM	BCl3 valve closed
10/21/2010	6:02:02 PM	PH3 valve closed
10/21/2010	6:02:02 PM	SiCl4 pre valve closed
10/21/2010	6:02:02 PM	SiCl4 post valve closed
10/21/2010	6:02:02 PM	Main Vac valve closed
10/21/2010	6:02:02 PM	Bypass valve closed
10/21/2010	6:02:02 PM	Bubbler valve closed
10/21/2010	6:02:02 PM	Helium MFC set to  0.000000
10/21/2010	6:02:02 PM	H2 MFC set to  0.000000
10/21/2010	6:02:02 PM	BCl3 MFC set to  0.000000
10/21/2010	6:02:02 PM	PHl3 MFC set to  0.000000
10/21/2010	6:02:02 PM	SiCl4 MFC set to  0.000000
10/21/2010	6:02:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:02:02 PM	Tube furnace set to 0
10/21/2010	6:02:03 PM	Run finished at 6:02 PM
10/21/2010	6:02:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/21/2010	6:04:33 PM	Recipe started at 6:04 PM
10/21/2010	6:04:33 PM	Helium valve closed
10/21/2010	6:04:33 PM	BCl3 valve closed
10/21/2010	6:04:33 PM	PH3 valve closed
10/21/2010	6:04:33 PM	SiCl4 pre valve closed
10/21/2010	6:04:33 PM	SiCl4 post valve closed
10/21/2010	6:04:33 PM	Main Vac valve closed
10/21/2010	6:04:33 PM	Bypass valve closed
10/21/2010	6:04:33 PM	Bubbler valve closed
10/21/2010	6:04:33 PM	H2 valve opened
10/21/2010	6:04:33 PM	Helium MFC set to  0.000000
10/21/2010	6:04:33 PM	H2 MFC set to  500.000000
10/21/2010	6:04:33 PM	BCl3 MFC set to  0.000000
10/21/2010	6:04:33 PM	PHl3 MFC set to  0.000000
10/21/2010	6:04:33 PM	SiCl4 MFC set to  0.000000
10/21/2010	6:04:33 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:04:34 PM	Tube furnace set to 0
10/21/2010	6:05:55 PM	Helium valve closed
10/21/2010	6:05:55 PM	BCl3 valve closed
10/21/2010	6:05:55 PM	PH3 valve closed
10/21/2010	6:05:55 PM	SiCl4 pre valve closed
10/21/2010	6:05:55 PM	SiCl4 post valve closed
10/21/2010	6:05:55 PM	Main Vac valve closed
10/21/2010	6:05:55 PM	Bypass valve closed
10/21/2010	6:05:55 PM	H2 valve opened
10/21/2010	6:05:55 PM	Bubbler valve opened
10/21/2010	6:05:55 PM	Helium MFC set to  0.000000
10/21/2010	6:05:55 PM	H2 MFC set to  500.000000
10/21/2010	6:05:55 PM	BCl3 MFC set to  0.000000
10/21/2010	6:05:55 PM	PHl3 MFC set to  0.000000
10/21/2010	6:05:55 PM	SiCl4 MFC set to  0.000000
10/21/2010	6:05:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:05:55 PM	Tube furnace set to 1000
10/21/2010	6:25:55 PM	Helium valve closed
10/21/2010	6:25:55 PM	PH3 valve closed
10/21/2010	6:25:55 PM	Main Vac valve closed
10/21/2010	6:25:55 PM	Bypass valve closed
10/21/2010	6:25:55 PM	H2 valve opened
10/21/2010	6:25:55 PM	BCl3 valve opened
10/21/2010	6:25:55 PM	SiCl4 pre valve opened
10/21/2010	6:25:55 PM	SiCl4 post valve opened
10/21/2010	6:25:55 PM	Bubbler valve opened
10/21/2010	6:25:55 PM	Helium MFC set to  0.000000
10/21/2010	6:25:55 PM	H2 MFC set to  500.000000
10/21/2010	6:25:55 PM	BCl3 MFC set to  6.000000
10/21/2010	6:25:55 PM	PHl3 MFC set to  0.000000
10/21/2010	6:25:55 PM	SiCl4 MFC set to  50.000000
10/21/2010	6:25:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:25:55 PM	Tube furnace set to 1000
10/21/2010	6:37:55 PM	H2 valve closed
10/21/2010	6:37:55 PM	BCl3 valve closed
10/21/2010	6:37:55 PM	PH3 valve closed
10/21/2010	6:37:55 PM	SiCl4 pre valve closed
10/21/2010	6:37:55 PM	SiCl4 post valve closed
10/21/2010	6:37:55 PM	Main Vac valve closed
10/21/2010	6:37:55 PM	Bypass valve closed
10/21/2010	6:37:55 PM	Helium valve opened
10/21/2010	6:37:55 PM	Bubbler valve opened
10/21/2010	6:37:55 PM	Helium MFC set to  500.000000
10/21/2010	6:37:55 PM	H2 MFC set to  0.000000
10/21/2010	6:37:55 PM	BCl3 MFC set to  0.000000
10/21/2010	6:37:55 PM	PHl3 MFC set to  0.000000
10/21/2010	6:37:55 PM	SiCl4 MFC set to  0.000000
10/21/2010	6:37:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:37:55 PM	Tube furnace set to 0
10/21/2010	6:57:55 PM	Helium valve closed
10/21/2010	6:57:55 PM	H2 valve closed
10/21/2010	6:57:55 PM	BCl3 valve closed
10/21/2010	6:57:55 PM	PH3 valve closed
10/21/2010	6:57:55 PM	SiCl4 pre valve closed
10/21/2010	6:57:55 PM	SiCl4 post valve closed
10/21/2010	6:57:55 PM	Main Vac valve closed
10/21/2010	6:57:55 PM	Bypass valve closed
10/21/2010	6:57:55 PM	Bubbler valve closed
10/21/2010	6:57:55 PM	Helium MFC set to  0.000000
10/21/2010	6:57:55 PM	H2 MFC set to  0.000000
10/21/2010	6:57:55 PM	BCl3 MFC set to  0.000000
10/21/2010	6:57:55 PM	PHl3 MFC set to  0.000000
10/21/2010	6:57:55 PM	SiCl4 MFC set to  0.000000
10/21/2010	6:57:55 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	6:57:55 PM	Tube furnace set to 0
10/21/2010	6:57:56 PM	Run finished at 6:57 PM
10/21/2010	7:04:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2010	7:04:27 PM	Recipe started at 7:04 PM
10/21/2010	7:04:27 PM	H2 valve closed
10/21/2010	7:04:27 PM	BCl3 valve closed
10/21/2010	7:04:27 PM	PH3 valve closed
10/21/2010	7:04:27 PM	SiCl4 pre valve closed
10/21/2010	7:04:27 PM	SiCl4 post valve closed
10/21/2010	7:04:27 PM	Main Vac valve closed
10/21/2010	7:04:27 PM	Bypass valve closed
10/21/2010	7:04:27 PM	Bubbler valve closed
10/21/2010	7:04:27 PM	Helium valve opened
10/21/2010	7:04:27 PM	Helium MFC set to  500.000000
10/21/2010	7:04:27 PM	H2 MFC set to  0.000000
10/21/2010	7:04:27 PM	BCl3 MFC set to  0.000000
10/21/2010	7:04:27 PM	PHl3 MFC set to  0.000000
10/21/2010	7:04:27 PM	SiCl4 MFC set to  0.000000
10/21/2010	7:04:27 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	7:04:28 PM	Tube furnace set to 0
10/21/2010	7:04:31 PM	Helium valve closed
10/21/2010	7:04:31 PM	H2 valve closed
10/21/2010	7:04:31 PM	BCl3 valve closed
10/21/2010	7:04:31 PM	PH3 valve closed
10/21/2010	7:04:31 PM	SiCl4 pre valve closed
10/21/2010	7:04:31 PM	SiCl4 post valve closed
10/21/2010	7:04:31 PM	Main Vac valve closed
10/21/2010	7:04:31 PM	Bypass valve closed
10/21/2010	7:04:31 PM	Bubbler valve closed
10/21/2010	7:04:31 PM	Helium MFC set to  0.000000
10/21/2010	7:04:31 PM	H2 MFC set to  0.000000
10/21/2010	7:04:31 PM	BCl3 MFC set to  0.000000
10/21/2010	7:04:31 PM	PHl3 MFC set to  0.000000
10/21/2010	7:04:31 PM	SiCl4 MFC set to  0.000000
10/21/2010	7:04:31 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	7:04:31 PM	Tube furnace set to 0
10/21/2010	7:04:31 PM	Run finished at 7:04 PM
10/21/2010	7:04:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/21/2010	7:20:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2010	7:20:25 PM	Recipe started at 7:20 PM
10/21/2010	7:20:25 PM	Helium valve closed
10/21/2010	7:20:25 PM	H2 valve closed
10/21/2010	7:20:25 PM	BCl3 valve closed
10/21/2010	7:20:25 PM	PH3 valve closed
10/21/2010	7:20:25 PM	SiCl4 pre valve closed
10/21/2010	7:20:25 PM	SiCl4 post valve closed
10/21/2010	7:20:25 PM	Main Vac valve closed
10/21/2010	7:20:25 PM	Bubbler valve closed
10/21/2010	7:20:25 PM	Bypass valve opened
10/21/2010	7:20:25 PM	Helium MFC set to  0.000000
10/21/2010	7:20:25 PM	H2 MFC set to  0.000000
10/21/2010	7:20:25 PM	BCl3 MFC set to  0.000000
10/21/2010	7:20:25 PM	PHl3 MFC set to  0.000000
10/21/2010	7:20:25 PM	SiCl4 MFC set to  0.000000
10/21/2010	7:20:25 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	7:20:25 PM	Tube furnace set to 0
10/21/2010	7:21:17 PM	Helium valve closed
10/21/2010	7:21:17 PM	H2 valve closed
10/21/2010	7:21:17 PM	BCl3 valve closed
10/21/2010	7:21:17 PM	PH3 valve closed
10/21/2010	7:21:17 PM	SiCl4 pre valve closed
10/21/2010	7:21:17 PM	SiCl4 post valve closed
10/21/2010	7:21:17 PM	Bubbler valve closed
10/21/2010	7:21:17 PM	Main Vac valve opened
10/21/2010	7:21:17 PM	Bypass valve opened
10/21/2010	7:21:17 PM	Helium MFC set to  0.000000
10/21/2010	7:21:17 PM	H2 MFC set to  0.000000
10/21/2010	7:21:17 PM	BCl3 MFC set to  0.000000
10/21/2010	7:21:17 PM	PHl3 MFC set to  0.000000
10/21/2010	7:21:17 PM	SiCl4 MFC set to  0.000000
10/21/2010	7:21:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	7:21:17 PM	Tube furnace set to 0
10/21/2010	7:21:17 PM	Run finished at 7:21 PM
10/21/2010	7:21:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2010	7:21:20 PM	Tube furnace set to 200
10/21/2010	8:13:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	8:13:53 PM	Recipe started at 8:13 PM
10/21/2010	8:13:53 PM	Helium valve closed
10/21/2010	8:13:53 PM	H2 valve closed
10/21/2010	8:13:53 PM	BCl3 valve closed
10/21/2010	8:13:53 PM	PH3 valve closed
10/21/2010	8:13:53 PM	SiCl4 pre valve closed
10/21/2010	8:13:53 PM	SiCl4 post valve closed
10/21/2010	8:13:53 PM	Main Vac valve closed
10/21/2010	8:13:53 PM	Bubbler valve closed
10/21/2010	8:13:53 PM	Bypass valve opened
10/21/2010	8:13:53 PM	Helium MFC set to  0.000000
10/21/2010	8:13:53 PM	H2 MFC set to  0.000000
10/21/2010	8:13:53 PM	BCl3 MFC set to  0.000000
10/21/2010	8:13:53 PM	PHl3 MFC set to  0.000000
10/21/2010	8:13:53 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:13:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:13:53 PM	Tube furnace set to 0
10/21/2010	8:13:54 PM	Helium valve closed
10/21/2010	8:13:54 PM	H2 valve closed
10/21/2010	8:13:54 PM	BCl3 valve closed
10/21/2010	8:13:54 PM	PH3 valve closed
10/21/2010	8:13:54 PM	SiCl4 pre valve closed
10/21/2010	8:13:54 PM	SiCl4 post valve closed
10/21/2010	8:13:54 PM	Bubbler valve closed
10/21/2010	8:13:54 PM	Main Vac valve opened
10/21/2010	8:13:54 PM	Bypass valve opened
10/21/2010	8:13:54 PM	Helium MFC set to  0.000000
10/21/2010	8:13:54 PM	H2 MFC set to  0.000000
10/21/2010	8:13:54 PM	BCl3 MFC set to  0.000000
10/21/2010	8:13:54 PM	PHl3 MFC set to  0.000000
10/21/2010	8:13:54 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:13:54 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:13:54 PM	Tube furnace set to 0
10/21/2010	8:14:00 PM	H2 valve closed
10/21/2010	8:14:00 PM	BCl3 valve closed
10/21/2010	8:14:00 PM	PH3 valve closed
10/21/2010	8:14:00 PM	SiCl4 pre valve closed
10/21/2010	8:14:00 PM	SiCl4 post valve closed
10/21/2010	8:14:00 PM	Bubbler valve closed
10/21/2010	8:14:00 PM	Helium valve opened
10/21/2010	8:14:00 PM	Main Vac valve opened
10/21/2010	8:14:00 PM	Bypass valve opened
10/21/2010	8:14:00 PM	Helium MFC set to  100.000000
10/21/2010	8:14:00 PM	H2 MFC set to  0.000000
10/21/2010	8:14:00 PM	BCl3 MFC set to  0.000000
10/21/2010	8:14:00 PM	PHl3 MFC set to  0.000000
10/21/2010	8:14:00 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:14:00 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:14:01 PM	Tube furnace set to 0
10/21/2010	8:15:01 PM	Helium valve closed
10/21/2010	8:15:01 PM	H2 valve closed
10/21/2010	8:15:01 PM	BCl3 valve closed
10/21/2010	8:15:01 PM	PH3 valve closed
10/21/2010	8:15:01 PM	SiCl4 pre valve closed
10/21/2010	8:15:01 PM	SiCl4 post valve closed
10/21/2010	8:15:01 PM	Bubbler valve closed
10/21/2010	8:15:01 PM	Main Vac valve opened
10/21/2010	8:15:01 PM	Bypass valve opened
10/21/2010	8:15:01 PM	Helium MFC set to  0.000000
10/21/2010	8:15:01 PM	H2 MFC set to  0.000000
10/21/2010	8:15:01 PM	BCl3 MFC set to  0.000000
10/21/2010	8:15:01 PM	PHl3 MFC set to  0.000000
10/21/2010	8:15:01 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:15:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:15:01 PM	Tube furnace set to 0
10/21/2010	8:16:01 PM	H2 valve closed
10/21/2010	8:16:01 PM	BCl3 valve closed
10/21/2010	8:16:01 PM	PH3 valve closed
10/21/2010	8:16:01 PM	SiCl4 pre valve closed
10/21/2010	8:16:01 PM	SiCl4 post valve closed
10/21/2010	8:16:01 PM	Bubbler valve closed
10/21/2010	8:16:01 PM	Helium valve opened
10/21/2010	8:16:01 PM	Main Vac valve opened
10/21/2010	8:16:01 PM	Bypass valve opened
10/21/2010	8:16:01 PM	Helium MFC set to  100.000000
10/21/2010	8:16:01 PM	H2 MFC set to  0.000000
10/21/2010	8:16:01 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:01 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:01 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:01 PM	Tube furnace set to 0
10/21/2010	8:16:07 PM	Helium valve closed
10/21/2010	8:16:07 PM	H2 valve closed
10/21/2010	8:16:07 PM	BCl3 valve closed
10/21/2010	8:16:07 PM	PH3 valve closed
10/21/2010	8:16:07 PM	SiCl4 pre valve closed
10/21/2010	8:16:07 PM	SiCl4 post valve closed
10/21/2010	8:16:07 PM	Bubbler valve closed
10/21/2010	8:16:07 PM	Main Vac valve opened
10/21/2010	8:16:07 PM	Bypass valve opened
10/21/2010	8:16:07 PM	Helium MFC set to  0.000000
10/21/2010	8:16:07 PM	H2 MFC set to  0.000000
10/21/2010	8:16:07 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:07 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:07 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:07 PM	Tube furnace set to 0
10/21/2010	8:16:07 PM	H2 valve closed
10/21/2010	8:16:07 PM	BCl3 valve closed
10/21/2010	8:16:07 PM	PH3 valve closed
10/21/2010	8:16:07 PM	SiCl4 pre valve closed
10/21/2010	8:16:07 PM	SiCl4 post valve closed
10/21/2010	8:16:07 PM	Bubbler valve closed
10/21/2010	8:16:07 PM	Helium valve opened
10/21/2010	8:16:07 PM	Main Vac valve opened
10/21/2010	8:16:07 PM	Bypass valve opened
10/21/2010	8:16:07 PM	Helium MFC set to  100.000000
10/21/2010	8:16:07 PM	H2 MFC set to  0.000000
10/21/2010	8:16:07 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:07 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:07 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:07 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:07 PM	Tube furnace set to 0
10/21/2010	8:16:08 PM	Helium valve closed
10/21/2010	8:16:08 PM	H2 valve closed
10/21/2010	8:16:08 PM	BCl3 valve closed
10/21/2010	8:16:08 PM	PH3 valve closed
10/21/2010	8:16:08 PM	SiCl4 pre valve closed
10/21/2010	8:16:08 PM	SiCl4 post valve closed
10/21/2010	8:16:08 PM	Bubbler valve closed
10/21/2010	8:16:08 PM	Main Vac valve opened
10/21/2010	8:16:08 PM	Bypass valve opened
10/21/2010	8:16:08 PM	Helium MFC set to  0.000000
10/21/2010	8:16:08 PM	H2 MFC set to  0.000000
10/21/2010	8:16:08 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:08 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:08 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:08 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:08 PM	Tube furnace set to 0
10/21/2010	8:16:09 PM	H2 valve closed
10/21/2010	8:16:09 PM	BCl3 valve closed
10/21/2010	8:16:09 PM	PH3 valve closed
10/21/2010	8:16:09 PM	SiCl4 pre valve closed
10/21/2010	8:16:09 PM	SiCl4 post valve closed
10/21/2010	8:16:09 PM	Bubbler valve closed
10/21/2010	8:16:09 PM	Helium valve opened
10/21/2010	8:16:09 PM	Main Vac valve opened
10/21/2010	8:16:09 PM	Bypass valve opened
10/21/2010	8:16:09 PM	Helium MFC set to  100.000000
10/21/2010	8:16:09 PM	H2 MFC set to  0.000000
10/21/2010	8:16:09 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:09 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:09 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:09 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:09 PM	Tube furnace set to 0
10/21/2010	8:16:13 PM	Helium valve closed
10/21/2010	8:16:13 PM	H2 valve closed
10/21/2010	8:16:13 PM	BCl3 valve closed
10/21/2010	8:16:13 PM	PH3 valve closed
10/21/2010	8:16:13 PM	SiCl4 pre valve closed
10/21/2010	8:16:13 PM	SiCl4 post valve closed
10/21/2010	8:16:13 PM	Bubbler valve closed
10/21/2010	8:16:13 PM	Main Vac valve opened
10/21/2010	8:16:13 PM	Bypass valve opened
10/21/2010	8:16:13 PM	Helium MFC set to  0.000000
10/21/2010	8:16:13 PM	H2 MFC set to  0.000000
10/21/2010	8:16:13 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:13 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:13 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:13 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:14 PM	Tube furnace set to 0
10/21/2010	8:16:14 PM	H2 valve closed
10/21/2010	8:16:14 PM	BCl3 valve closed
10/21/2010	8:16:14 PM	PH3 valve closed
10/21/2010	8:16:14 PM	SiCl4 pre valve closed
10/21/2010	8:16:14 PM	SiCl4 post valve closed
10/21/2010	8:16:14 PM	Bubbler valve closed
10/21/2010	8:16:14 PM	Helium valve opened
10/21/2010	8:16:14 PM	Main Vac valve opened
10/21/2010	8:16:14 PM	Bypass valve opened
10/21/2010	8:16:14 PM	Helium MFC set to  100.000000
10/21/2010	8:16:14 PM	H2 MFC set to  0.000000
10/21/2010	8:16:14 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:14 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:14 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:14 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:14 PM	Tube furnace set to 0
10/21/2010	8:16:15 PM	Helium valve closed
10/21/2010	8:16:15 PM	H2 valve closed
10/21/2010	8:16:15 PM	BCl3 valve closed
10/21/2010	8:16:15 PM	PH3 valve closed
10/21/2010	8:16:15 PM	SiCl4 pre valve closed
10/21/2010	8:16:15 PM	SiCl4 post valve closed
10/21/2010	8:16:15 PM	Bubbler valve closed
10/21/2010	8:16:15 PM	Main Vac valve opened
10/21/2010	8:16:15 PM	Bypass valve opened
10/21/2010	8:16:15 PM	Helium MFC set to  0.000000
10/21/2010	8:16:15 PM	H2 MFC set to  0.000000
10/21/2010	8:16:15 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:15 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:15 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:15 PM	Tube furnace set to 0
10/21/2010	8:16:15 PM	H2 valve closed
10/21/2010	8:16:15 PM	BCl3 valve closed
10/21/2010	8:16:15 PM	PH3 valve closed
10/21/2010	8:16:15 PM	SiCl4 pre valve closed
10/21/2010	8:16:15 PM	SiCl4 post valve closed
10/21/2010	8:16:15 PM	Bubbler valve closed
10/21/2010	8:16:15 PM	Helium valve opened
10/21/2010	8:16:15 PM	Main Vac valve opened
10/21/2010	8:16:15 PM	Bypass valve opened
10/21/2010	8:16:15 PM	Helium MFC set to  100.000000
10/21/2010	8:16:15 PM	H2 MFC set to  0.000000
10/21/2010	8:16:15 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:15 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:15 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:15 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:15 PM	Tube furnace set to 0
10/21/2010	8:16:17 PM	Helium valve closed
10/21/2010	8:16:17 PM	H2 valve closed
10/21/2010	8:16:17 PM	BCl3 valve closed
10/21/2010	8:16:17 PM	PH3 valve closed
10/21/2010	8:16:17 PM	SiCl4 pre valve closed
10/21/2010	8:16:17 PM	SiCl4 post valve closed
10/21/2010	8:16:17 PM	Bubbler valve closed
10/21/2010	8:16:17 PM	Main Vac valve opened
10/21/2010	8:16:17 PM	Bypass valve opened
10/21/2010	8:16:17 PM	Helium MFC set to  0.000000
10/21/2010	8:16:17 PM	H2 MFC set to  0.000000
10/21/2010	8:16:17 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:17 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:17 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:17 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:18 PM	Tube furnace set to 0
10/21/2010	8:16:20 PM	H2 valve closed
10/21/2010	8:16:20 PM	BCl3 valve closed
10/21/2010	8:16:20 PM	PH3 valve closed
10/21/2010	8:16:20 PM	SiCl4 pre valve closed
10/21/2010	8:16:20 PM	SiCl4 post valve closed
10/21/2010	8:16:20 PM	Bubbler valve closed
10/21/2010	8:16:20 PM	Helium valve opened
10/21/2010	8:16:20 PM	Main Vac valve opened
10/21/2010	8:16:20 PM	Bypass valve opened
10/21/2010	8:16:20 PM	Helium MFC set to  100.000000
10/21/2010	8:16:20 PM	H2 MFC set to  0.000000
10/21/2010	8:16:20 PM	BCl3 MFC set to  0.000000
10/21/2010	8:16:20 PM	PHl3 MFC set to  0.000000
10/21/2010	8:16:20 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:16:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:16:20 PM	Tube furnace set to 0
10/21/2010	8:17:20 PM	Helium valve closed
10/21/2010	8:17:20 PM	H2 valve closed
10/21/2010	8:17:20 PM	BCl3 valve closed
10/21/2010	8:17:20 PM	PH3 valve closed
10/21/2010	8:17:20 PM	SiCl4 pre valve closed
10/21/2010	8:17:20 PM	SiCl4 post valve closed
10/21/2010	8:17:20 PM	Bubbler valve closed
10/21/2010	8:17:20 PM	Main Vac valve opened
10/21/2010	8:17:20 PM	Bypass valve opened
10/21/2010	8:17:20 PM	Helium MFC set to  0.000000
10/21/2010	8:17:20 PM	H2 MFC set to  0.000000
10/21/2010	8:17:20 PM	BCl3 MFC set to  0.000000
10/21/2010	8:17:20 PM	PHl3 MFC set to  0.000000
10/21/2010	8:17:20 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:17:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:17:20 PM	Tube furnace set to 0
10/21/2010	8:18:20 PM	H2 valve closed
10/21/2010	8:18:20 PM	BCl3 valve closed
10/21/2010	8:18:20 PM	PH3 valve closed
10/21/2010	8:18:20 PM	SiCl4 pre valve closed
10/21/2010	8:18:20 PM	SiCl4 post valve closed
10/21/2010	8:18:20 PM	Bubbler valve closed
10/21/2010	8:18:20 PM	Helium valve opened
10/21/2010	8:18:20 PM	Main Vac valve opened
10/21/2010	8:18:20 PM	Bypass valve opened
10/21/2010	8:18:20 PM	Helium MFC set to  100.000000
10/21/2010	8:18:20 PM	H2 MFC set to  0.000000
10/21/2010	8:18:20 PM	BCl3 MFC set to  0.000000
10/21/2010	8:18:20 PM	PHl3 MFC set to  0.000000
10/21/2010	8:18:20 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:18:20 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:18:20 PM	Tube furnace set to 0
10/21/2010	8:19:20 PM	Helium valve closed
10/21/2010	8:19:20 PM	H2 valve closed
10/21/2010	8:19:20 PM	BCl3 valve closed
10/21/2010	8:19:20 PM	PH3 valve closed
10/21/2010	8:19:20 PM	SiCl4 pre valve closed
10/21/2010	8:19:20 PM	SiCl4 post valve closed
10/21/2010	8:19:21 PM	Bubbler valve closed
10/21/2010	8:19:21 PM	Main Vac valve opened
10/21/2010	8:19:21 PM	Bypass valve opened
10/21/2010	8:19:21 PM	Helium MFC set to  0.000000
10/21/2010	8:19:21 PM	H2 MFC set to  0.000000
10/21/2010	8:19:21 PM	BCl3 MFC set to  0.000000
10/21/2010	8:19:21 PM	PHl3 MFC set to  0.000000
10/21/2010	8:19:21 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:19:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:19:21 PM	Tube furnace set to 0
10/21/2010	8:20:21 PM	H2 valve closed
10/21/2010	8:20:21 PM	BCl3 valve closed
10/21/2010	8:20:21 PM	PH3 valve closed
10/21/2010	8:20:21 PM	SiCl4 pre valve closed
10/21/2010	8:20:21 PM	SiCl4 post valve closed
10/21/2010	8:20:21 PM	Bubbler valve closed
10/21/2010	8:20:21 PM	Helium valve opened
10/21/2010	8:20:21 PM	Main Vac valve opened
10/21/2010	8:20:21 PM	Bypass valve opened
10/21/2010	8:20:21 PM	Helium MFC set to  100.000000
10/21/2010	8:20:21 PM	H2 MFC set to  0.000000
10/21/2010	8:20:21 PM	BCl3 MFC set to  0.000000
10/21/2010	8:20:21 PM	PHl3 MFC set to  0.000000
10/21/2010	8:20:21 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:20:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:20:21 PM	Tube furnace set to 0
10/21/2010	8:21:21 PM	Helium valve closed
10/21/2010	8:21:21 PM	H2 valve closed
10/21/2010	8:21:21 PM	BCl3 valve closed
10/21/2010	8:21:21 PM	PH3 valve closed
10/21/2010	8:21:21 PM	SiCl4 pre valve closed
10/21/2010	8:21:21 PM	SiCl4 post valve closed
10/21/2010	8:21:21 PM	Bubbler valve closed
10/21/2010	8:21:21 PM	Main Vac valve opened
10/21/2010	8:21:21 PM	Bypass valve opened
10/21/2010	8:21:21 PM	Helium MFC set to  0.000000
10/21/2010	8:21:21 PM	H2 MFC set to  0.000000
10/21/2010	8:21:21 PM	BCl3 MFC set to  0.000000
10/21/2010	8:21:21 PM	PHl3 MFC set to  0.000000
10/21/2010	8:21:21 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:21:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:21:21 PM	Tube furnace set to 0
10/21/2010	8:22:21 PM	H2 valve closed
10/21/2010	8:22:21 PM	BCl3 valve closed
10/21/2010	8:22:21 PM	PH3 valve closed
10/21/2010	8:22:21 PM	SiCl4 pre valve closed
10/21/2010	8:22:21 PM	SiCl4 post valve closed
10/21/2010	8:22:21 PM	Bubbler valve closed
10/21/2010	8:22:21 PM	Helium valve opened
10/21/2010	8:22:21 PM	Main Vac valve opened
10/21/2010	8:22:21 PM	Bypass valve opened
10/21/2010	8:22:21 PM	Helium MFC set to  100.000000
10/21/2010	8:22:21 PM	H2 MFC set to  0.000000
10/21/2010	8:22:21 PM	BCl3 MFC set to  0.000000
10/21/2010	8:22:21 PM	PHl3 MFC set to  0.000000
10/21/2010	8:22:21 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:22:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:22:21 PM	Tube furnace set to 0
10/21/2010	8:23:21 PM	Helium valve closed
10/21/2010	8:23:21 PM	H2 valve closed
10/21/2010	8:23:21 PM	BCl3 valve closed
10/21/2010	8:23:21 PM	PH3 valve closed
10/21/2010	8:23:21 PM	SiCl4 pre valve closed
10/21/2010	8:23:21 PM	SiCl4 post valve closed
10/21/2010	8:23:21 PM	Bubbler valve closed
10/21/2010	8:23:21 PM	Main Vac valve opened
10/21/2010	8:23:21 PM	Bypass valve opened
10/21/2010	8:23:21 PM	Helium MFC set to  0.000000
10/21/2010	8:23:21 PM	H2 MFC set to  0.000000
10/21/2010	8:23:21 PM	BCl3 MFC set to  0.000000
10/21/2010	8:23:21 PM	PHl3 MFC set to  0.000000
10/21/2010	8:23:21 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:23:21 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:23:21 PM	Tube furnace set to 0
10/21/2010	8:23:22 PM	Run finished at 8:23 PM
10/21/2010	8:23:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
10/21/2010	8:34:10 PM	Tube furnace set to 200
10/21/2010	8:34:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/21/2010	8:34:44 PM	Recipe started at 8:34 PM
10/21/2010	8:34:44 PM	Helium valve closed
10/21/2010	8:34:44 PM	H2 valve closed
10/21/2010	8:34:44 PM	BCl3 valve closed
10/21/2010	8:34:44 PM	PH3 valve closed
10/21/2010	8:34:44 PM	SiCl4 pre valve closed
10/21/2010	8:34:44 PM	SiCl4 post valve closed
10/21/2010	8:34:44 PM	Main Vac valve closed
10/21/2010	8:34:44 PM	Bypass valve closed
10/21/2010	8:34:44 PM	Bubbler valve closed
10/21/2010	8:34:44 PM	Helium MFC set to  0.000000
10/21/2010	8:34:44 PM	H2 MFC set to  0.000000
10/21/2010	8:34:44 PM	BCl3 MFC set to  0.000000
10/21/2010	8:34:44 PM	PHl3 MFC set to  0.000000
10/21/2010	8:34:44 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:34:44 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:34:44 PM	Tube furnace set to 0
10/21/2010	8:34:44 PM	Run finished at 8:34 PM
10/21/2010	8:34:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
10/21/2010	8:35:36 PM	Recipe started at 8:35 PM
10/21/2010	8:35:36 PM	Helium valve closed
10/21/2010	8:35:36 PM	BCl3 valve closed
10/21/2010	8:35:36 PM	PH3 valve closed
10/21/2010	8:35:36 PM	SiCl4 pre valve closed
10/21/2010	8:35:36 PM	SiCl4 post valve closed
10/21/2010	8:35:36 PM	Main Vac valve closed
10/21/2010	8:35:36 PM	Bypass valve closed
10/21/2010	8:35:36 PM	Bubbler valve closed
10/21/2010	8:35:36 PM	H2 valve opened
10/21/2010	8:35:36 PM	Helium MFC set to  0.000000
10/21/2010	8:35:36 PM	H2 MFC set to  500.000000
10/21/2010	8:35:36 PM	BCl3 MFC set to  0.000000
10/21/2010	8:35:36 PM	PHl3 MFC set to  0.000000
10/21/2010	8:35:36 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:35:36 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:35:36 PM	Tube furnace set to 0
10/21/2010	8:36:53 PM	Helium valve closed
10/21/2010	8:36:53 PM	BCl3 valve closed
10/21/2010	8:36:53 PM	PH3 valve closed
10/21/2010	8:36:53 PM	SiCl4 pre valve closed
10/21/2010	8:36:53 PM	SiCl4 post valve closed
10/21/2010	8:36:53 PM	Main Vac valve closed
10/21/2010	8:36:53 PM	Bypass valve closed
10/21/2010	8:36:53 PM	H2 valve opened
10/21/2010	8:36:53 PM	Bubbler valve opened
10/21/2010	8:36:53 PM	Helium MFC set to  0.000000
10/21/2010	8:36:53 PM	H2 MFC set to  500.000000
10/21/2010	8:36:53 PM	BCl3 MFC set to  0.000000
10/21/2010	8:36:53 PM	PHl3 MFC set to  0.000000
10/21/2010	8:36:53 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:36:53 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:36:54 PM	Tube furnace set to 1000
10/21/2010	8:53:01 PM	Helium valve closed
10/21/2010	8:53:01 PM	BCl3 valve closed
10/21/2010	8:53:01 PM	PH3 valve closed
10/21/2010	8:53:01 PM	SiCl4 pre valve closed
10/21/2010	8:53:01 PM	SiCl4 post valve closed
10/21/2010	8:53:01 PM	Main Vac valve closed
10/21/2010	8:53:01 PM	Bypass valve closed
10/21/2010	8:53:01 PM	H2 valve opened
10/21/2010	8:53:01 PM	Bubbler valve opened
10/21/2010	8:53:01 PM	Helium MFC set to  0.000000
10/21/2010	8:53:01 PM	H2 MFC set to  500.000000
10/21/2010	8:53:01 PM	BCl3 MFC set to  0.000000
10/21/2010	8:53:01 PM	PHl3 MFC set to  0.000000
10/21/2010	8:53:01 PM	SiCl4 MFC set to  0.000000
10/21/2010	8:53:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:53:01 PM	Tube furnace set to 1000
10/21/2010	8:55:01 PM	Helium valve closed
10/21/2010	8:55:01 PM	PH3 valve closed
10/21/2010	8:55:01 PM	Main Vac valve closed
10/21/2010	8:55:01 PM	Bypass valve closed
10/21/2010	8:55:01 PM	H2 valve opened
10/21/2010	8:55:01 PM	BCl3 valve opened
10/21/2010	8:55:01 PM	SiCl4 pre valve opened
10/21/2010	8:55:01 PM	SiCl4 post valve opened
10/21/2010	8:55:01 PM	Bubbler valve opened
10/21/2010	8:55:01 PM	Helium MFC set to  0.000000
10/21/2010	8:55:01 PM	H2 MFC set to  500.000000
10/21/2010	8:55:01 PM	BCl3 MFC set to  2.000000
10/21/2010	8:55:01 PM	PHl3 MFC set to  0.000000
10/21/2010	8:55:01 PM	SiCl4 MFC set to  50.000000
10/21/2010	8:55:01 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	8:55:01 PM	Tube furnace set to 1000
10/21/2010	9:07:01 PM	H2 valve closed
10/21/2010	9:07:01 PM	BCl3 valve closed
10/21/2010	9:07:01 PM	PH3 valve closed
10/21/2010	9:07:01 PM	SiCl4 pre valve closed
10/21/2010	9:07:02 PM	SiCl4 post valve closed
10/21/2010	9:07:02 PM	Main Vac valve closed
10/21/2010	9:07:02 PM	Bypass valve closed
10/21/2010	9:07:02 PM	Helium valve opened
10/21/2010	9:07:02 PM	Bubbler valve opened
10/21/2010	9:07:02 PM	Helium MFC set to  500.000000
10/21/2010	9:07:02 PM	H2 MFC set to  0.000000
10/21/2010	9:07:02 PM	BCl3 MFC set to  0.000000
10/21/2010	9:07:02 PM	PHl3 MFC set to  0.000000
10/21/2010	9:07:02 PM	SiCl4 MFC set to  0.000000
10/21/2010	9:07:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	9:07:02 PM	Tube furnace set to 0
10/21/2010	9:27:02 PM	Helium valve closed
10/21/2010	9:27:02 PM	H2 valve closed
10/21/2010	9:27:02 PM	BCl3 valve closed
10/21/2010	9:27:02 PM	PH3 valve closed
10/21/2010	9:27:02 PM	SiCl4 pre valve closed
10/21/2010	9:27:02 PM	SiCl4 post valve closed
10/21/2010	9:27:02 PM	Main Vac valve closed
10/21/2010	9:27:02 PM	Bypass valve closed
10/21/2010	9:27:02 PM	Bubbler valve closed
10/21/2010	9:27:02 PM	Helium MFC set to  0.000000
10/21/2010	9:27:02 PM	H2 MFC set to  0.000000
10/21/2010	9:27:02 PM	BCl3 MFC set to  0.000000
10/21/2010	9:27:02 PM	PHl3 MFC set to  0.000000
10/21/2010	9:27:02 PM	SiCl4 MFC set to  0.000000
10/21/2010	9:27:02 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	9:27:02 PM	Tube furnace set to 0
10/21/2010	9:27:02 PM	Run finished at 9:27 PM
10/21/2010	11:17:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/21/2010	11:17:46 PM	Recipe started at 11:17 PM
10/21/2010	11:17:46 PM	Helium valve closed
10/21/2010	11:17:46 PM	H2 valve closed
10/21/2010	11:17:46 PM	BCl3 valve closed
10/21/2010	11:17:46 PM	PH3 valve closed
10/21/2010	11:17:46 PM	SiCl4 pre valve closed
10/21/2010	11:17:46 PM	SiCl4 post valve closed
10/21/2010	11:17:46 PM	Main Vac valve closed
10/21/2010	11:17:46 PM	Bubbler valve closed
10/21/2010	11:17:46 PM	Bypass valve opened
10/21/2010	11:17:46 PM	Helium MFC set to  0.000000
10/21/2010	11:17:46 PM	H2 MFC set to  0.000000
10/21/2010	11:17:46 PM	BCl3 MFC set to  0.000000
10/21/2010	11:17:46 PM	PHl3 MFC set to  0.000000
10/21/2010	11:17:46 PM	SiCl4 MFC set to  0.000000
10/21/2010	11:17:46 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	11:17:47 PM	Tube furnace set to 0
10/21/2010	11:18:38 PM	Helium valve closed
10/21/2010	11:18:38 PM	H2 valve closed
10/21/2010	11:18:38 PM	BCl3 valve closed
10/21/2010	11:18:38 PM	PH3 valve closed
10/21/2010	11:18:38 PM	SiCl4 pre valve closed
10/21/2010	11:18:38 PM	SiCl4 post valve closed
10/21/2010	11:18:38 PM	Bubbler valve closed
10/21/2010	11:18:38 PM	Main Vac valve opened
10/21/2010	11:18:38 PM	Bypass valve opened
10/21/2010	11:18:38 PM	Helium MFC set to  0.000000
10/21/2010	11:18:38 PM	H2 MFC set to  0.000000
10/21/2010	11:18:38 PM	BCl3 MFC set to  0.000000
10/21/2010	11:18:38 PM	PHl3 MFC set to  0.000000
10/21/2010	11:18:38 PM	SiCl4 MFC set to  0.000000
10/21/2010	11:18:38 PM	Bypass solenoid MFC set to  0.000000
10/21/2010	11:18:38 PM	Tube furnace set to 0
10/21/2010	11:18:38 PM	Run finished at 11:18 PM
10/21/2010	11:18:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
